Open Data Service, University of Southampton

Open Data Service

Contactless Wafer Geometry Gauge (P/N EHMX203-4-37-Q)

Subproject: 514658101 PO: 60565072 Trans: 50979101

Facility: http://id.southampton.ac.uk/facility/F10000
Part of: Physical Sciences and Engineering
Optoelectronics Research Centre
Location: Physics

Contact

GATES, JAMES
+442380597811

If you have additions or corrections to a facility or equipment entry please contact your Faculty Finance Team.

Get the Data

If you're that way inclined, you can get the raw data used to create this page in various formats, as listed below.

TTLRDF/Turtle file
RDFRDF/XML file
RDF.HTMLHTML visualisation of raw data

The following open datasets were used to build this page:

Facilities and Equipment